qtac100
| High-sensitivity LEIS (static) |
| 1st atom, In – depth ( 0 – 10 nm ) |
| Atomic composition of the outermost atomic layer |
| Energy 1 – 8 keV |
| Lateral resolution 0.01 – 1 mm |
| Quantitative !! |
| No matrix effects |
Application
- segregation, anti-wetting,
clusters,..
- ALD
growth, high-k, ALD-MOCVD,
- diffusion
barriers, implantation,
- M
/ polymer, SAMs