Surface Analysis Equipments

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XPS

PRODUCT

ESCALAB Xi+

Excellent Sensitivity & Ultimate Detectability

Spectroscopy with unbeaten sensitivity and energy resolution
Fast parallel imaging with resolution <3 μm
Quantitative imaging
Real-time physical imaging for accurate sample alignment
Microfocused monochromator for rapid sample analysis of small areas
Automated for unattended operation
ISS, REELS & Preploc chamber included in base system
Optional Field-emission AES and UPS and MAGCIS (Mono & Gas Cluser Ion Source)

Application

Monatomic And Gas Cluster Ion Source (MAGCIS) : Full control through Avantage software

  - Experimental operation, Mode switching, Gas handling, Differential pumping, Parameter logging


XPS-UPS depth profiling :

•Fully automated data acquisition and source control within Avantage
•X-ray source switched off throughout UPS spectrum acquisition
•Turnkey charge neutralisation for both XPS and UPS
•Concurrent acquisition from same analysis point